Novosyadlyj, S.P., S.I. Boyko, and M.V. Kotyk. “Features Multilevel Metallization Forming a Submicron Structures of Large Integrated Circuits”. Physics and Chemistry of Solid State 17, no. 4 (December 15, 2016): 630–636. Accessed November 26, 2024. https://vps.pnu.edu.ua/index.php/pcss/article/view/1240.